| Code |
Course Name |
Language |
Type |
| MAK 4007E |
Microsystem -MEMS Design |
English |
Elective |
| Local Credits |
ECTS |
Theoretical |
Tutorial |
Laboratory |
| 2.5 |
5.5 |
2 |
1 |
0 |
| Course Prerequisites and Class Restriction |
| Prerequisites |
(MUK 210 MIN DD
or MUK 210E MIN DD
or MAK 220 MIN DD
or MAK 220E MIN DD)
and (AKM 209 MIN DD
or AKM 209E MIN DD
or MAK 229 MIN DD
or MAK 229E MIN DD)
and (MAK 214E MIN DD
or MAK 214 MIN DD
or MAK 224 MIN DD
or MAK 224E MIN DD)
|
| Class Restriction |
4.Class |
| Course Description |
| MEMS (Microsystem) design principles. Introduction to surface and bulk micromachining. Principles on electrostatic design. Sensing by
piezoresistive elements and design in micro-scale. Sensing by magnetic forces. Lumped and energy methods in design. Case studies:
Piezoresistive pressure sensor, microfudic system and mechanical structure for bio-sensing. |
|
