Course Information

Course Code:
Course Number:
Code Course Name Language Type
MAK 4001E Heat and Mass Transfer in Mini and Micro Scale Systems English Elective
Local Credits ECTS Theoretical Tutorial Laboratory
2.5 5.5 2 1 0
Course Prerequisites and Class Restriction
Prerequisites (MAK 313 MIN DD
or MAK 313E MIN DD
or MAK 311 MIN DD
or MAK 311E MIN DD)

and (AKM 209 MIN DD
or AKM 209E MIN DD
or MAK 229 MIN DD
or MAK 229E MIN DD)

Class Restriction 4.Class
Course Description
Basics of MEMS. Working principles of valves, pumps, and fluidics in microsystems. Scaling in acceleration, time, power, power density. Scaling in electrostatic forces. Scaling in fluidics and heat transfer. Diffusion processes in MEMS design. Surface tension. Capillary effect. Micropumping. Rarefied gas. Knudsen number. Microgas flow. Heat conduction in submicrometerscale.Electronic cooling. Flow distribution in mini/micro channel manifolds.